JPH03100740U - - Google Patents
Info
- Publication number
- JPH03100740U JPH03100740U JP825490U JP825490U JPH03100740U JP H03100740 U JPH03100740 U JP H03100740U JP 825490 U JP825490 U JP 825490U JP 825490 U JP825490 U JP 825490U JP H03100740 U JPH03100740 U JP H03100740U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- wind speed
- unit
- clean room
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005856 abnormality Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990008254U JP2529381Y2 (ja) | 1990-01-31 | 1990-01-31 | クリーンルームのクリーンユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990008254U JP2529381Y2 (ja) | 1990-01-31 | 1990-01-31 | クリーンルームのクリーンユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03100740U true JPH03100740U (en]) | 1991-10-21 |
| JP2529381Y2 JP2529381Y2 (ja) | 1997-03-19 |
Family
ID=31511887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990008254U Expired - Lifetime JP2529381Y2 (ja) | 1990-01-31 | 1990-01-31 | クリーンルームのクリーンユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2529381Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014005952A (ja) * | 2012-06-21 | 2014-01-16 | Mitsubishi Electric Corp | 環境監視装置及びこれを備えた冷凍サイクル装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5742316U (en]) * | 1980-08-22 | 1982-03-08 | ||
| JPS63287U (en]) * | 1986-06-19 | 1988-01-05 |
-
1990
- 1990-01-31 JP JP1990008254U patent/JP2529381Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5742316U (en]) * | 1980-08-22 | 1982-03-08 | ||
| JPS63287U (en]) * | 1986-06-19 | 1988-01-05 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014005952A (ja) * | 2012-06-21 | 2014-01-16 | Mitsubishi Electric Corp | 環境監視装置及びこれを備えた冷凍サイクル装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2529381Y2 (ja) | 1997-03-19 |